Browsing by Author Kim T.-G.
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Issue Date | Title | Author(s) | Supervisor(s) |
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2021 | Tungsten passivation layer (WO3) formation mechanisms during chemical mechanical planarization in the presence of oxidizers | Poddar M.K.; Jalalzai P.; Sahir S.; Yerriboina N.P.; Kim T.-G.; Park J.-G. | - |